The 61st JSAP Spring Meeting, 2014

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16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[19a-D2-1~11] 16.2 Processing technologies and devices

Wed. Mar 19, 2014 9:30 AM - 12:30 PM D2 (D113)

11:00 AM - 11:15 AM

[19a-D2-6] Crystalline silicon germanium films grown on crystalline silicon substrates by solid phase crystallization

○（M1）Yuji Kojima1, Masao Isomura1,2 (Tokai Univ., Graduate School of Engineering1, Tokai Univ., Dept. Engineering2)

Keywords:固相成長,SiGe,結晶