[19a-D5-1~12] 6.6 Probe microscopy

△ [19a-D5-3] Environmental controlled non-contact atomic force microscopy observation of etching of Si surfaces by atomic hydrogen irradiation

^○Tomoaki Miyagi¹, Akira Sasahara¹, Masahiko Tomitori¹, Ryohei Kokawa², Ohta Masahiro², Hirofumi Yamada³, Kei Kobayashi^3,4, Noriaki Oyabu⁵ (JAIST.¹, Shimadzu Corp.², Kyoto Univ.³, Hakubi Center Kyoto Univ.⁴, JST⁵)

Keywords:原子状水素