[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-E14-7] Characteristic Evaluation of TFTs with Conventional and Strip Pattern Crystallized by Atmospheric Micro-Thermal-Plasma-Jet

^○Seiji Morisaki¹, Shohei Hayashi¹, Takahiro Kamikura¹, Shogo Yamamoto¹, Masato Yamane¹, Taichi Nakatani¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:TFT,CMOS,TPJ