[19a-E4-1~5] Silicon Technology Division Award

[19a-E4-5] [Silicon Technology Division Award Speech]Self-Heating Effects and Analog Performance Optimization of Fin-Type Field-Effect Transistors

^○Tsunaki Takahashi¹, Nobuyasu Beppu², Kunro Chen², Shunri Oda³, Ken Uchida^1,2 (Dept. of Electrical and Electronics Engineering, Keio Univ.¹, Dept. of Physical Electronics, Tokyo Inst. Tech.², QNERC, Tokyo Inst. Tech.³)

Keywords:FinFET,自己加熱効果,アナログ特性