[19a-E8-1~9] 6.3 Oxide-based electronics

[19a-E8-8] Growth of VO₂ (B) thin films by reactive sputtering and its transformation to VO₂ (M1) phase

^○Binti Azhan Nurul Hanis¹, Kui Su¹, Kunio Okimura¹ (Tokai Univ.¹)

Keywords:二酸化バナジウム,反応性スパッタ法,ポストアニール