The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[19a-E8-1~9] 6.3 Oxide-based electronics

Wed. Mar 19, 2014 9:15 AM - 11:45 AM E8 (E202)

11:15 AM - 11:30 AM

[19a-E8-8] Growth of VO2 (B) thin films by reactive sputtering and its transformation to VO2 (M1) phase

○Binti Azhan Nurul Hanis1, Kui Su1, Kunio Okimura1 (Tokai Univ.1)

Keywords:二酸化バナジウム,反応性スパッタ法,ポストアニール