[19a-F10-1~10] 3.2 Materials optics

[19a-F10-10] Antireflection films consisting of mesoporous silica with a sub-wavelength structure

^○Shin Kitamura¹, Masatoshi Watanabe¹, Masahiko Takahashi¹, Yosuke Kanno², Kazuyuki Kuroda², Hirokatsu Miyata¹ (Canon Inc.¹, Waseda Univ.²)

Keywords:反射防止膜,サブ波長構造,メソポーラス