The 61st JSAP Spring Meeting, 2014

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Oral presentation

01. Applied Physics in General » 1.7 Instrumentation and measurement

[19a-F5-1~9] 1.7 Instrumentation and measurement

Wed. Mar 19, 2014 9:30 AM - 12:00 PM F5 (F305)

9:45 AM - 10:00 AM

[19a-F5-2] Humidity calibration by a gas filter for hydrogen sensing using a quartz oscillator

○Atsushi Suzuki1, Hisao Hojo2, Takichi Kobayashi3 (AIST1, Vacuum products Co.2, VPI Co.3)

Keywords:水素センサ,湿度変化,粘性計測