The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.5 Surface physics and vacuum

[19a-F7-1~10] 6.5 Surface physics and vacuum

Wed. Mar 19, 2014 9:15 AM - 12:00 PM F7 (F307)

9:30 AM - 9:45 AM

[19a-F7-2] Growth of SiON on SiC(0001) and surface structure analysis by LEED

Ryo Kohmatsu1, Takeshi Nakagawa1, Seigi Mizuno1 (Kyushu Univ.1)

Keywords:シリコンカーバイド