[19a-F7-1~10] 6.5 Surface physics and vacuum

[19a-F7-4] Molecularly Chemisorbed Oxygen Observed in Room-Temperature Oxidation at Si(100)-2x1 Surface

^○Akitaka Yoshigoe¹, Ryuta Okada², Yuden Teraoka^1,3, Yutaro Iwai³, Yoichi Yamada², Masahiro Sasaki² (JAEA¹, Univ. of Tsukuba², Univ. of Hyogo³)

Keywords:Si(100)ドライ酸化,分子状吸着,その場観察