[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

[19a-PA4-10] Polar effect on DLC formation by using dielectric barrier surface discharge plasma

^○Tetsuya Takuwa¹, Kazuya Tada¹, Shinji Yasui¹ (Nagoya Inst. Tech¹)

Keywords:沿面放電