The 61st JSAP Spring Meeting, 2014

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Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PA4 (アリーナ)

9:30 AM - 11:30 AM

[19a-PA4-10] Polar effect on DLC formation by using dielectric barrier surface discharge plasma

○Tetsuya Takuwa1, Kazuya Tada1, Shinji Yasui1 (Nagoya Inst. Tech1)

Keywords:沿面放電