The 61st JSAP Spring Meeting, 2014

Presentation information

Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PA4 (アリーナ)

9:30 AM - 11:30 AM

[19a-PA4-11] Formation of Nanodome of Titanium Dioxide Using a Coaxial Gas-Flow Low-Pressure Pulse Plasma

Hiroki Shirahata1, Satoru Iizuka1 (Tohoku Univ.1)

Keywords:nanodome,TiO2