[19a-PA4-1~12] 8.3 プラズマ成膜・表面処理

▼ [19a-PA4-7] Evaluation of amine functionalities bound on the ZnO surface by plasma processing used for biomolecule detection

^○MihaiAlexandruCiolan¹，IulianaMotrescu²，DumitruLuca³，MasaakiNagatsu¹ (Shizuoka University GSST¹，Shizuoka University RIE²，Al.I Cuza University Iasi Romania³)

キーワード：zinc oxide,plasma functionalization,amine groups