9:30 AM - 11:30 AM
[19a-PA4-8] Changes in the local atomic structure in SiNx films grown by VHF-PECVD
Keywords:窒化シリコン膜,化学的気相成長,プラズマ成膜
Presentation information
Poster presentation
08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment
[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment
Wed. Mar 19, 2014 9:30 AM - 11:30 AM PA4 (アリーナ)