[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

[19a-PA4-9] Carbon nitride films synthesized by dual microwave plasma source CVD

^○Takayoshi Kiguchi¹, Osamu Ikai², Nagahiro Saito^1,2,3 (Green Mobility Collaborative Research Center, Nagoya Univ.¹, Department of Materials, Graduate School of Engineering, Nagoya Univ.², EcoTopia Science Research Institute, Nagoya Univ.³)

Keywords:窒化炭素