[19a-PA5-1~6] 8.5 Plasma nanotechnology

[19a-PA5-2] Microstructures of SiO:CH particles Fabricated by CCP-CVD

^○（B）Shigeki Kuzuoka¹, Yasushi Inoue¹, Osamu Takai² (Chiba Inst. Technol.¹, Kanto Gakuin Univ.²)

Keywords:ナノ粒子,膜構造,プラズマ