[19a-PG1-1~10] 6.2 Carbon-based thin films

[19a-PG1-7] Emission characteristics of BCN thin films fabricated by RF-sputtering methods

^○Takashi Okawa¹, Masaki Satake¹, Kunio Itoh¹, Michihito Teramoto², Shigeyuki Nakamura², Kenta Kametomo³, Ken-ichi Takarabe³, Kazutoshi Fukui⁴, Shin-ichi Yamamoto¹ (Ryukoku Univ.¹, Tsuyama Nat. College of Tech.², Okayama Univ. of Sci.³, Univ. of Fukui⁴)

Keywords:窒化ホウ素炭素