[19a-PG2-1~42] 11.0 Superconductivity (Poster)

▲ [19a-PG2-27] Epitaxial Growth of TiN films on Single-crystal Si(100) Substrates with High Vacuum Magnetron Sputtering Method

^○Rui Sun¹, Kazumasa Makise¹, Wei Qiu¹, Hirotaka Terai¹, Zhen Wang² (National Institute of Information and Communications Technology¹, Shanghai Institute of Microsystem And Information Technology²)

Keywords:TiN,sputtering,epitaxial