Solid phase growth of Mg<sub>2</sub>Si thin films on poly-Si/glass substrates prepared by AIC

Presentation information

Poster presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PG3 (G棟2階)

9:30 AM - 11:30 AM

^○Satoru Kawaguchi¹, Sho Hidaka¹, Tetsuya Hashimoto¹, Hiroshi Katsumata¹ (Meiji University¹)

Keywords:Al誘起成長法,多結晶Si薄膜,Mg2Si