Observation of damaged layer in 4H-SiC substrates by Mirror Electron Microscope

Presentation information

Poster presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PG5 (G棟2階)

9:30 AM - 11:30 AM

^○Masayuki Sasaki¹, Kentaro Tamura¹, Makoto Kitabatake¹, Hirohumi Matsuhata², Kazutoshi Kojima² (FUPET¹, AIST²)

Keywords:シリコンカーバイド