The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19a-PG5-1~8] 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PG5 (G棟2階)

9:30 AM - 11:30 AM

△ [19a-PG5-4] Evaluation by TEM of misfit dislocations in silicon epitaxial wafers

○Kota Kawamoto1, Tetsuya Nagai2, Kengo Noami2, Katsuhiko Nakai2, Tousirou Niki2, Hidekazu Yamamoto1 (Chiba Inst. of Tech.1, Nippon Steel & Sumikin Tech.2)

Keywords:Siエピタキシャルウエハ,ミスフィット転位,透過電子顕微鏡