[19p-D1-1~20] 4.7 Laser processing

△ [19p-D1-1] Analysis of DLC films made by femtosecond PLD of a frozen cyclohexane target

^○Yuki Wagatsuma¹, Takahiro Nakamura¹, Shunichi Sato¹ (IMRAM, Tohoku Univ.¹)

Keywords:フェムト秒PLD法,DLC薄膜,冷凍ターゲット