[19p-D1-1~20] 4.7 Laser processing

△ [19p-D1-11] N-type Doping in 4H-SiC by Laser Irradiation in Chemical Solutions and its Diffusion Properties of Impurities

^○（B）Yuki Inoue¹, Hiroshi Ikenoue¹, Akihiro Ikeda¹, Daisuke Nakamura¹, Tatsuo Okada¹, Tanemasa Asano¹ (Kyushu Univ.¹)

Keywords:レーザー,ドーピング,SiC