[19p-D1-1~20] 4.7 Laser processing

△ [19p-D1-4] Temperature Dependence of Electric Conductivities in Femtosecond Laser Modified Areas on Silicon Carbide

^○Tomoki Oka¹, Manato Deki^1,2, Yoshiki Naoi¹, Takahiro Makino², Takeshi Ohshima², Takuro Tomita¹ (Tokushima Univ.¹, JAEA²)

Keywords:フェムト秒レーザー改質