[19p-D10-1~6] 6.1 Ferroelectric thin films

[19p-D10-1] Investigation of the top electrode deposited on BST thin film variable capacitor ～Study of the interface between the top electrode and BST layer～

^○Yutaka Kishimoto¹, Michiko Daimon¹, Tetsuya Kimura¹, Hideyuki Kato¹, Michio Kadota^1,2 (Murata Manufacturing Co., Ltd.¹, Tohoku Univ.²)

Keywords:BST