Investigation of the top electrode deposited on BST thin film variable capacitor ～Study of the interface between the top electrode and BST layer～

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

Wed. Mar 19, 2014 2:00 PM - 3:30 PM D10 (D316)

2:00 PM - 2:15 PM

^○Yutaka Kishimoto¹, Michiko Daimon¹, Tetsuya Kimura¹, Hideyuki Kato¹, Michio Kadota^1,2 (Murata Manufacturing Co., Ltd.¹, Tohoku Univ.²)

Keywords:BST