Investigation of the bottom electrode under BST thin film variable capacitor ～Improvement of characteristics of the BST films focused on the bottom electrode～

Yutaka Kishimoto

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-D10-1~6] 6.1 Ferroelectric thin films

Wed. Mar 19, 2014 2:00 PM - 3:30 PM D10 (D316)

2:15 PM - 2:30 PM

[19p-D10-2] Investigation of the bottom electrode under BST thin film variable capacitor ～Improvement of characteristics of the BST films focused on the bottom electrode～

Yutaka Kishimoto¹, ^○Daiki Murauchi¹, Michiko Daimon¹, Tetsuya Kimura¹, Hideyuki Kato¹, Michio Kadota^1,2 (Murata Manufacturing Co., Ltd.¹, Tohoku Univ.²)

Keywords:BST

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