The Effect of Ethylenediaminetetraacetic Acid on LPD-(Ba, Sr)TiO<sub>3</sub> Processes

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

Wed. Mar 19, 2014 2:00 PM - 3:30 PM D10 (D316)

3:00 PM - 3:15 PM

^○Fumihiro Kemmotsu¹, Masaki Kashimori¹, Naoya Yokota¹, Nobuo Haneji¹ (Yokohama National Univ. Graduate School of Engineering¹)

Keywords:Liquid-Phase-Deposition,Thin Film,High-k