[19p-D10-1~6] 6.1 Ferroelectric thin films

[19p-D10-6] Ferroelectric property of Hf_0.5Zr_0.5)O₂

^○Tatsuhiko Yokouchi¹, Takao Shimizu¹, Takahiro Oikawa¹, Takahisa Shiraishi¹, Hiroshi Funakubo¹, Takanori Kiguchi², Akihiro Akama², J. Konno Toyohiko², Dong Jik Kim³, Alexei Gruverman³ (Tokyo Institute of Technology¹, Tohoku UIniversity², University of Nebraska-Lincoln³)

Keywords:強誘電体,ハフニウム