[19p-D2-1~11] 16.1 Fundamental properties and their evaluation in disordered materials

△ [19p-D2-4] Evaluation of Crystallinity Profile in Poly-Si Thin Layer by Raman Spectroscopy

^○Hiromasa Yasukawa¹, Motihiro Tomita¹, Daisuke Kosemura¹, Hideyuki Yamazaki², Mitsuhiro Tomita², Koji Usuda², Atsushi Ogura¹ (Meiji Univ.¹, Toshiba²)

Keywords:ラマン分光法,多結晶Si