The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.1 Fundamental properties and their evaluation in disordered materials

[19p-D2-1~11] 16.1 Fundamental properties and their evaluation in disordered materials

Wed. Mar 19, 2014 2:00 PM - 5:15 PM D2 (D113)

3:00 PM - 3:15 PM

[19p-D2-4] Evaluation of Crystallinity Profile in Poly-Si Thin Layer by Raman Spectroscopy

Hiromasa Yasukawa1, Motihiro Tomita1, Daisuke Kosemura1, Hideyuki Yamazaki2, Mitsuhiro Tomita2, Koji Usuda2, Atsushi Ogura1 (Meiji Univ.1, Toshiba2)

Keywords:ラマン分光法,多結晶Si