Sputtering growth of β-FeSi<sub>2</sub> polycrystalline films with low carrier density and conduction mechanism

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Wed. Mar 19, 2014 2:00 PM - 5:45 PM D3 (D114)

4:30 PM - 4:45 PM

^○（B）Tetsu Hattori¹, Takahiko Higashi¹, Hiroaki Tsukamoto¹, Haruki Yamaguchi¹, Yoshikazu Terai¹ (Kagoshima Univ.¹)

Keywords:シリサイド