[19p-D3-1~14] 14.1 Physical properties of exploratory materials

[19p-D3-11] Thickness – dependent electrical characterization of β-FeSi₂

^○Takafumi Kato¹, Taichi Inamura¹, Akito Sasaki³, Katsuaki Aoki³, kuniyuki Kakushima², Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², hitoshi Wakabayashi², kazuo Tsutsui², Kenji Natori¹, Hiroshi Iwai¹ (Tokyo Tech. FRC¹, Tokyo Tech IGSSE², Toshiba Material Co., LTD³)

Keywords:FeSi2,環境半導体,光吸収係数