[19p-D3-1~14] 14.1 Physical properties of exploratory materials

[19p-D3-7] RBS Study of Behavior of Cu Diffusion in β-FeSi₂

^○Yuuya Noguchi¹, Tatsuya Mizuki¹, Yuki Kawakubo¹, Tomoaki Hirata¹, Seiya Kagawa¹, Tomohiro Nagatsuyu¹, Ryotaro Iwamoto¹, Kohei Shibahara¹, Kazumasa Narumi², Yoshihito Maeda^1,2 (Kyutech¹, JAEA ASRC²)

Keywords:鉄シリサイド,半導体シリサイド,ラザフォード後方散乱分光法