The 61st JSAP Spring Meeting, 2014

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06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-D6-1~18] 6.4 New thin-film materials

Wed. Mar 19, 2014 1:45 PM - 6:30 PM D6 (D209)

1:45 PM - 2:00 PM

▲ [19p-D6-1] In situ temperature measurement of oxide thin films at a nanosecond time scale during pulsed UV laser irradiation

○Kentaro Shinoda1, Tomohiko Nakajima1, Tetsuo Tsuchiya1 (AIST1)

Keywords:excimer laser,temperature measurement,ELAMOD