[19p-D6-1~18] 6.4 New thin-film materials

△ [19p-D6-10] Fabrication of TiH₂ thin films by pulsed-laser deposition

^○Takayuki Suzuki¹, Kohei Yoshimatsu¹, Nobuo Tsuchimine², Takayoshi Ohshima¹, Akira Ohtomo^1,3,4 (Tokyo Institute of Technology¹, TOSHIMA Manufacturing Co.², MCES³, JST-ALCA⁴)

Keywords:パルスレーザ堆積法,水素化物,チタン