The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-D6-1~18] 6.4 New thin-film materials

Wed. Mar 19, 2014 1:45 PM - 6:30 PM D6 (D209)

6:00 PM - 6:15 PM

[19p-D6-17] Effect of O2 introduction on Al doped CeO2 thin films deposited by sputtering method (2)

Yuki Notani1, Takuya Okazaki1, Kenta Hara1, Takashi Osawa1, Keisuke Hibino1, Setsu Suzuki2, Keiji Ishibashi2, Yasuhiro Yamamoto1 (Hosei Univ.1, Comet Inc.2)

Keywords:スパッタ法,CeO2