High Density Formation of Mn and Mn-Germanide Nanodots Induced by Remote Hydrogen Plasma

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Wed. Mar 19, 2014 2:00 PM - 7:00 PM D9 (D315)

4:30 PM - 4:45 PM

^○Yinghui Wen¹, Katsunori Makihara¹, Akio Ohta², Mitsuhisa Ikeda³, Seichi MIyazaki¹ (Nagoya Univ.¹, Nagoya Univ. VBL², Hiroshima Univ.³)

Keywords:Mnジャーマナイド,リモート水素プラズマ