[19p-E10-1~11] Creation of New Functional Materials by Wide-bandgap Oxide Semiconductors

[19p-E10-10] Fabrication and Characterization of 2-inch (-201) β-Ga₂O₃ Substrates

^○Takekazu Masui¹, Kimiyoshi Koshi¹, Kazuyuki Iizuka², Shinya Watanabe², Masaru Takizawa², Yu Yamaoka¹, Kei Doioka², Saori Umemura², Daiki Wakimoto², Akito Kuramata², Shigenobu Yamakoshi² (Koha Co., Ltd¹, Tamura Corp.²)

Keywords:酸化ガリウム