[19p-E11-1~19] 14.4 Optical properties and light-emitting devices

△ [19p-E11-10] High temperature deposition of ZnO fluorescent thin films by RF magnetron sputtering and observation of samples by electron beam excitation assisted microscope

^○Satoshi Kanamori^1,2, Aki Miyake², Wataru Inami^1,2,3, Hiroko Kominami¹, Yoshimasa Kawata^1,2,3, Yoichiro Nakanishi² (Graduate school of Engineering, Shizuoka Univ.¹, Research Institute of Electronics, Shizuoka Univ.², JST-CREST³)

Keywords:酸化亜鉛