[19p-E13-1~17] Materials science of singularity in nitride semiconductors -growth, fabrication, creation of new functions-

[19p-E13-17] Expectations for nitride-based three dimensional devices fabricated by understanding and controlling surface reaction

^○Hiroshi Amano¹ (Nagoya Univ., ARC¹)

Keywords:窒化物半導体,表面反応