[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-16] Half-Inch Silicon CVD Reactor Using Concentrated Infrared Light Heater(2)

Ning Li¹, ^○Hitoshi Habuka¹, Shin-ichi Ikeda^{2, 3}, Yuuku Ishida^2、3, Shiro Hara^{2, 3} (Yokohama National Univ.¹, MINIMAL², AIST³)

Keywords:ミニマルマニュファクチャリング,化学気相堆積法