6:30 PM - 6:45 PM
[19p-E14-21] Development of a 3D-IC Tester for Minimal 3D-IC Fab
Keywords:3次元集積回路,ミニマルファブ,テスター
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
Wed. Mar 19, 2014 1:15 PM - 6:45 PM E14 (E302)
6:30 PM - 6:45 PM
Keywords:3次元集積回路,ミニマルファブ,テスター