The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 1:15 PM - 6:45 PM E14 (E302)

2:15 PM - 2:30 PM

[19p-E14-5] Development of Wafer Transfer System for Vacuum Process in the Minimalfab

Hitoshi Maekawa1,3, Shinichi Imai2,3, Sommawan Khumpuang1,3, Shiro Hara1,3 (AIST1, TAZMO2, MINIMAL3)

Keywords:ミニマルファブ