The 61st JSAP Spring Meeting, 2014

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Oral presentation

12. Organic Molecules and Bioelectronics » 12.7 Medical engineering and biochips

[19p-E15-1~17] 12.7 Medical engineering and biochips

Wed. Mar 19, 2014 1:15 PM - 5:45 PM E15 (E303)

5:15 PM - 5:30 PM

▲ [19p-E15-16] Conductive DLC Film Prepared by NBECVD for Bio-LSI Sensor

○Xijiang Chang1, Yoshiyuki Kikuchi1,2, Masanori Nakano3, Kumi Inoue3,4, Tomokazu Matsue3,4,5, Toshihisa Nozawa2, Seiji Samukawa1,5 (IFS, Tohoku Univ.1, Tokyo Electron Ltd.2, Grad. Sch. Environmental Studies, Tohoku Univ.3, microSIC, Tohoku Univ.4, WPI-AIMR, Tohoku Univ.5)

Keywords:導電性カーボン膜,中性粒子ビーム化学気相成長,バイオセンサー