Conductive DLC Film Prepared by NBECVD for Bio-LSI Sensor

Xijiang Chang

Presentation information

Oral presentation

12. Organic Molecules and Bioelectronics » 12.7 Medical engineering and biochips

[19p-E15-1~17] 12.7 Medical engineering and biochips

Wed. Mar 19, 2014 1:15 PM - 5:45 PM E15 (E303)

5:15 PM - 5:30 PM

▲ [19p-E15-16] Conductive DLC Film Prepared by NBECVD for Bio-LSI Sensor

^○Xijiang Chang¹, Yoshiyuki Kikuchi^1,2, Masanori Nakano³, Kumi Inoue^3,4, Tomokazu Matsue^3,4,5, Toshihisa Nozawa², Seiji Samukawa^1,5 (IFS, Tohoku Univ.¹, Tokyo Electron Ltd.², Grad. Sch. Environmental Studies, Tohoku Univ.³, microSIC, Tohoku Univ.⁴, WPI-AIMR, Tohoku Univ.⁵)

Keywords:導電性カーボン膜,中性粒子ビーム化学気相成長,バイオセンサー