[19p-E18-7~19] 17.4 Device application

△ [19p-E18-10] Estimation of the contact resistivity and Schottky barrier height at CNT/SiC interface by top contact electrode

^○Kazuma Suzuki¹, Masafumi Inaba¹, Megumi Shibuya¹, Chih-Yu Lee¹, Miho Myodo¹, Atsushi Hiraiwa¹, Yoshiho Masuda², Wataru Norimatsu², Michiko Kusunoki², Hiroshi Kawarada¹ (Waseda Univ.¹, Nagoya Univ.²)

Keywords:カーボンナノチューブ,炭化珪素,ショットキー障壁