Direct deposition of high-k Y2O3 on h-BN by ALD

Presentation information

Oral presentation

17. Nanocarbon Technology » 17.3 Exploration of new functions and evaluation of basic properties

Wed. Mar 19, 2014 1:15 PM - 3:30 PM E2 (E102)

2:15 PM - 2:30 PM

^○Nobuaki Takahashi¹, Kosuke Nagashio¹, Tomonori Nishimura¹, Akira Toriumi¹, Takashi Taniguchi², Kenji Watanabe² (Univ. of Tokyo¹, NIMS²)

Keywords:ALD,BN,グラフェン