The 61st JSAP Spring Meeting, 2014

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Oral presentation

12. Organic Molecules and Bioelectronics » 12.1 Fabrications and Structure Controls

[19p-E5-1~21] 12.1 Fabrications and Structure Controls

Wed. Mar 19, 2014 1:15 PM - 7:00 PM E5 (E105)

4:45 PM - 5:00 PM

[19p-E5-14] Analysis of the damage of organic devices caused by face target spattering process

○Kouji Suemori1, Satoshi Hoshino1, Nobuki Ibaraki1, Toshihide Kamata1 (AIST1)

Keywords:対抗ターゲット,有機デバイス